Définition de 2E2 TFT Flat Panel Display Catégorie de sources
Uses and emissions of predominantly CF4, CHF3, NF3 and SF6 during the fabrication of thin-film transistors (TFTs) on glass substrates for flat panel display manufacture. In addition to these gases, C2F6, C3F8 and c-C4F8 may also be used and emitted during the manufacture of thin and smart displays.
Intergovernmental Panel on Climate Change (IPCC), 2006 IPCC Guidelines for National Greenhouse Gas Inventories. Prepared by the National Greenhouse Gas Inventories Programme, Eggleston H.S., Buenida L., Miwa K., Ngara T., and Tanabe K. (eds.). IGES, 2006.
Available online at: http://www.ipcc-tfi.iges.or.jp/public/2006gl/index.html