Definition of 2E1 Integrated Circuit or Semiconductor Source Category
Emissions of CF4, C2F6, C3F8, c-C4F8, C4F6, C4F8O, C5F8, CHF3, CH2F2, NF3 and SF6 from uses of these gases in Integrated Circuit (IC) manufacturing in rapidly evolving ways and in varying amounts, which depend on product (e.g., memory or logic devices) and equipment manufacturer.
Intergovernmental Panel on Climate Change (IPCC), 2006 IPCC Guidelines for National Greenhouse Gas Inventories. Prepared by the National Greenhouse Gas Inventories Programme, Eggleston H.S., Buenida L., Miwa K., Ngara T., and Tanabe K. (eds.). IGES, 2006.
Available online at: http://www.ipcc-tfi.iges.or.jp/public/2006gl/index.html